December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.11.03

Atomic Layer Deposition of Hf-Doped ZnO Thin Films with Enhanced Thermoelectric Properties

When and Where

Dec 5, 2019
2:15pm - 2:30pm
Hynes, Level 3, Room 310

Presenter(s)

Co-Author(s)

Jenichi Clairvaux Felizco1,Taneli Juntunen2,Jarkko Etula2,Camilla Tossi2,Mutsunori Uenuma1,Yasuaki Ishikawa1,Yukiharu Uraoka1,Ilkka Tittonen2

Nara Institute of Science and Technology1,Aalto University2

Keywords

Hf | thermoelectricity

Symposium Organizers

Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS

Symposium Support

Gold
GVD Corporation
Lam Research Corp

Silver
Specialty Coating Systems

Bronze
Waterloo Institute for Nanotechnology

Session Chairs

Mato Knez
David Munoz-Rojas

In this Session