April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
MA03.06.07
Progress Towards CMOS Compatible Atomic-Precision Fabrication
When and Where
Apr 5, 2018
11:00am - 11:15am
11:00am - 11:15am
PCC West, 100 Level, Room 102 A
Presenter(s)
Co-Author(s)
Daniel Ward1,Michael Marshall1,DeAnna Campbell1,Tzu-Ming Lu1,Lisa Tracy1,Justin Koepke1,David Scrymgeour1,Ezra Bussmann1,Shashank Misra1
Sandia National Laboratories1
Keywords
lithography (deposition) | nanostructure | scanning tunneling microscopy (STM)
Symposium Organizers
Sergei Kalinin, Oak Ridge National Laboratory
Jeremy Barton, Nanofactory Corporation
Mitra Taheri, Drexel University
Wu Zhou, University of Chinese Academy of Sciences
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Jeremy Barton
Sergei Kalinin