April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
CM04.07.01

In Situ Study of Noble Metal Atomic Layer Deposition Processes Using X-Ray Scattering

When and Where

Apr 5, 2018
8:00am - 8:30am
PCC North, 100 Level, Room 132 A

Presenter(s)

Co-Author(s)

Jolien Dendooven1,Eduardo Solano1,2,Ranjith Ramachandran1,Matthias Minjauw1,Ji-Yu Feng1,Alessandro Coati3,Daniel Hermida-Merino4,Christophe Detavernier1

Ghent University1,ALBA Synchrotron2,Synchrotron SOLEIL3,ESRF4

Keywords

atomic layer deposition | in situ | nucleation & growth

Symposium Organizers

Simone Raoux, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH
Jean-Jacques Gallet, Sorbonne Universités - UPMC Université Paris
Scott Misture, Alfred University
Massimo Tallarida, ALBA Synchrotron Light Source

Symposium Support

International Centre for Diffraction Data (ICDD)
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.

Session Chairs

Geoffroy Prevot
Joachim Schnadt

In this Session