April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
EP01.10.05
TiNx and TaNx Films via Low-Temperature Thermal ALD Using Anhydrous N2H4
When and Where
Apr 6, 2018
9:00am - 9:15am
9:00am - 9:15am
PCC North, 200 Level, Room 224 A
Presenter(s)
Co-Author(s)
Steven Wolf1,Michael Breeden1,Mahmut Sami Kavrik1,Jun Hong Park1,Daniel Alvarez2,Mehul Naik3,Andrew Kummel1
University of California, San Diego1,Rasirc2,Applied Materials3
Keywords
atomic layer deposition | nitride
Symposium Organizers
John Robertson, Cambridge University
Jesus del Alamo, Massachusetts Institute of Technology
Andrew Kummel, University of California, San Diego
Masaaki Niwa, Tohoku University
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Andrew Kummel