April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
EP01.01.01
Novel Gate Stack Engineering for High Mobility Ge nFETs
When and Where
Apr 3, 2018
10:30am - 11:00am
10:30am - 11:00am
PCC North, 200 Level, Room 224 A
Presenter(s)
Co-Author(s)
Hiroaki Arimura1,Daire Cott1,Roger Loo1,Kurt Wostyn1,Guillaume Boccardi1,Jacopo Franco1,Sonja Sioncke1,Qi Xie2,Fu Tang3,Xiaoqiang Jiang3,Michael Givens3,Eddie Chiu4,Jerome Mitard1,Dan Mocuta1,Nadine Collaert1
imec1,ASM Belgium2,ASM International3,HPSP4
Keywords
atomic layer deposition | electrical properties | interface
Symposium Organizers
John Robertson, Cambridge University
Jesus del Alamo, Massachusetts Institute of Technology
Andrew Kummel, University of California, San Diego
Masaaki Niwa, Tohoku University
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Jesus del Alamo
Andrew Kummel