April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
MA03.06.04
In Situ TEM Imaging of the Etching Kinetics of the High Aspect Ratio Silicon Nanopatterns Fabricated onto Liquid Cell TEM Window
When and Where
Apr 5, 2018
10:00am - 10:15am
10:00am - 10:15am
PCC West, 100 Level, Room 102 A
Presenter(s)
Co-Author(s)
Yuliya Lisunova1,Utkur Mirsaidov1
National University of Singapore1
Keywords
Si | transmission electron microscopy (TEM)
Symposium Organizers
Sergei Kalinin, Oak Ridge National Laboratory
Jeremy Barton, Nanofactory Corporation
Mitra Taheri, Drexel University
Wu Zhou, University of Chinese Academy of Sciences
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Jeremy Barton
Sergei Kalinin