April 2 - 6, 2018
Phoenix, Arizona
2018 MRS Spring Meeting
EN16.05.17
Preparation of Highly Piezoelectric Sc-Doped GaN Thin Film
When and Where
Apr 4, 2018
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Masato Uehara1,2,Takaaki Mizuno3,Yasuhiro Aida3,Hokuto Shigemoto2,Saki Tanaka2,Toshimi Nagase1,Hiroshi Yamada1,Keiichi Umeda3,Morio Akiyama1
National Institute of Advanced Industrial Science and Technology (AIST)1,Kyushu University2,Murata Manufacturing Co., Ltd.3
Keywords
III-V | sputtering
Symposium Organizers
Tito Busani, University of New Mexico
Sergej Filonovich, TOTAL GAS
Olga Lavrova, Sandia National Laboratories
Robert Opila, University of Delaware
Symposium Support
MRS Invitation to Publish
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
All authors are invited to submit articles based on their 2018 MRS Spring
Meeting presentations to journals in the MRS portfolio.
(www.mrs.org/publications-news) Papers submitted and accepted for
publication in MRS Advances (www.mrs.org/mrs-advances) will be
available as symposium collections. Visit the MRS/Cambridge University
Press Publications Booth #100 in the Exhibit Hall to learn more, including
MRS Advances print options available at special rates during the meeting
week only.
Session Chairs
Tito Busani
Robert Opila