November 25 - 30, 2017
Boston, Massachusetts
2017 MRS Fall Meeting
EM08.07.07

Decontamination and Passivation of Superconducting Al Resonators with Supercritical NF3

When and Where

Nov 29, 2017
11:30am - 11:45am
Hynes, Level 1, Room 111

Presenter(s)

Co-Author(s)

Chris Barrett1,Rodrigo Guerrero1,Bruce Arey1,Shutthanandan Vaithiyalingam1,Marvin Warner1,Ashish Alexander2,Chris Weddle2,Christopher Richardson2

Pacific Northwest National Laboratory1,Laboratory for Physical Sciences2

Keywords

Al | x-ray photoelectron spectroscopy (XPS)

Symposium Organizers

Christopher Richardson, University of Maryland
Jeffrey McCallum, University of Melbourne
Javad Shabani, The City College of New York
Clare Yu, University of California, Irvine

Symposium Support

Google Inc.
IBM Corp.
Microsoft
Quantum Science and Technology | IOP Publishing
MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Maja Cassidy

In this Session