Focused Ion Beam Induced Deposition of Complex Nanoscale 3D-Structures via Helium Ion Beam Irradiation

When and Where

Nov 29, 2017
11:00am - 11:15am

Hynes, Level 2, Room 201

Presenter(s)

Matthew Burch

Anton Ievlev

Michael Stanford

Brett Lewis

Xiahan Sang

Songkil Kim

Jason Fowlkes

Philip Rack

Raymond Unocic

Alex Belianinov

Olga Ovchinnikova

Co-Author(s)

Olga Ovchinnikova¹,Matthew Burch¹,Anton Ievlev¹,Michael Stanford²,Brett Lewis²,Xiahan Sang¹,Songkil Kim¹,Jason Fowlkes¹,Philip Rack²,Raymond Unocic¹,Alex Belianinov¹

Oak Ridge National Laboratory¹,University of Tennessee, Knoxville²

Keywords

ion-beam assisted deposition

Symposium Organizers

Alex Belianinov, Oak Ridge National Laboratory

Frances Allen, University of California, Berkeley

Shinichi Ogawa, National Institute of Advanced Industrial Science and Technology

Tom Wirtz, Luxembourg Institute of Science and Technology (LIST)

Symposium Support

Raith America, Inc.
ZEISS Microscopy

MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Frances Allen