November 25 - 30, 2017
Boston, Massachusetts
2017 MRS Fall Meeting
EM06.05.23
Investigation of Single Crystal Diamond Deposition Quality and Growth Rate Versus Off-Cut Angle from the (100) Crystallographic Plane
When and Where
Nov 27, 2017
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Ayan Bhattacharya1,Ramon Diaz1,Timothy Grotjohn1,2
Michigan State University1,Fraunhofer USA Center for Coatings and Diamond Technologies2
Keywords
diamond | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Philippe Bergonzo, CEA Saclay
Timothy Grotjohn, Michigan State University
Mutsuko Hatano, Tokyo Institute of Technology
Christoph Nebel, Fraunhofer IAF
Symposium Support
Applied Diamond, Inc.
Arios Ltd.
CARAT Systems
CIVIDEC Instrumentation GmbH
Cline Innovations, LLC
DiamFab
ICDAT LTD.
Microwave Enterprises, Ltd.
Fraunhofer Center for Coatings and Diamond Technologies- Michigan State University
New Diamond Technology, LLC
Seki Diamond Systems
Arios Ltd.
CARAT Systems
CIVIDEC Instrumentation GmbH
Cline Innovations, LLC
DiamFab
ICDAT LTD.
Microwave Enterprises, Ltd.
Fraunhofer Center for Coatings and Diamond Technologies- Michigan State University
New Diamond Technology, LLC
Seki Diamond Systems
MRS Invitation to Publish
All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.
Session Chairs
Paul May