Growth and Physical Properties of High Quality, Epitaxial Titanium Nitride Prepared by Controllably-Unbalanced Reactive Magnetron Epitaxy

When and Where

Nov 29, 2017
1:45pm - 2:00pm

Hynes, Level 1, Room 111

Presenter(s)

Amber Reed

Hadley Smith

Rachel Adams

Shin Mou

Lawrence Grazulis

Michael McConney

Kurt Eyink

Ashish Alexander

Chris Weddle

Christopher Richardson

Augustine Urbas

Co-Author(s)

Amber Reed¹,Hadley Smith^1,2,Rachel Adams^1,2,Shin Mou¹,Lawrence Grazulis^1,3,Michael McConney¹,Kurt Eyink¹,Ashish Alexander⁴,Chris Weddle⁴,Christopher Richardson⁴,Augustine Urbas¹

Air Force Research Lab¹,University of Dayton²,University of Dayton Research Institute³,University of Maryland⁴

Keywords

electrical properties | epitaxy | nitride

Symposium Organizers

Christopher Richardson, University of Maryland

Jeffrey McCallum, University of Melbourne

Javad Shabani, The City College of New York

Clare Yu, University of California, Irvine

Symposium Support

Google Inc.
IBM Corp.
Microsoft
Quantum Science and Technology | IOP Publishing

MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Jonilyn Yoder

2017 MRS Fall Meeting