November 25 - 30, 2017
Boston, Massachusetts
2017 MRS Fall Meeting
ES11.12.03
Evaluating Depth Distribution of Excimer Laser Induced Defects in Silicon Using Micro-Photoluminescence Spectroscopy
When and Where
Nov 30, 2017
9:15am - 9:30am
9:15am - 9:30am
Hynes, Level 2, Room 204
Presenter(s)
Co-Author(s)
Richard Monflier1,2,Toshiyuki Tabata3,Megane Turpin1,2,Amin Benyoucef1,2,Filadelfo Cristiano1,2,Karim Huet3,Fulvio Mazzamuto3,Antonino La Magna4,Salvatore Lombardo4,Julien Roul1,2,Elena Bedel-Pereira1,2
LAAS-CNRS1,Université de Toulouse 2,SCREEN-LASSE3,IMM CNR4
Keywords
laser annealing | luminescence | secondary ion mass spectroscopy (SIMS)
Symposium Organizers
Olindo Isabella, Delft University of Technology
Stefaan De Wolf, King Abdullah University of Science and Technology (KAUST)
Lakshmi Krishna, Colorado School of Mines
Noritaka Usami, Nagoya University
Symposium Support
Applied Physics Letters ǀ AIP Publishing
National Renewal Energy Laboratory
National Renewal Energy Laboratory
MRS Invitation to Publish
All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.
Session Chairs
Marcie Black