Residual Stress Analysis during Surface Process of Single Sapphire Wafer by HRXRD

When and Where

Nov 30, 2017
8:00pm - 10:00pm

Hynes, Level 1, Hall B

Presenter(s)

In-young Jung

Seungwoo Song

Minhyuk Choi

Jaesuk Kim

Eun Kyu Kim

Chang-Soo Kim

Co-Author(s)

Chang Soo Kim²,In-young Jung^1,2,Seungwoo Song²,Minhyuk Choi²,Jaesuk Kim²,Eun Kyu Kim¹

Hanyang University¹,Korea Research Institute of Standards and Science²

Keywords

x-ray diffraction (XRD)

Symposium Organizers

Robert Kaplar, Sandia National Laboratories

Mitsuru Funato, Kyoto University

Matteo Meneghini, University of Padova

Rachael Myers-Ward, U.S. Naval Research Laboratory

Symposium Support

MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Robert Kaplar

2017 MRS Fall Meeting