November 25 - 30, 2017
Boston, Massachusetts
2017 MRS Fall Meeting
NM05.01.05

Plasma-Enhanced Atomic Layer Deposition of MoS2—From 2D Monolayers to 3D Vertical Nanofins

When and Where

Nov 27, 2017
10:45am - 11:00am
Hynes, Level 3, Room 313

Presenter(s)

Co-Author(s)

Ageeth Bol1,Akhil Sharma1,Marcel Verheijen1,Vincent Vandalon1,Harm C.M. Knoops2,1,Ravi Sundaram2,Erwin Kessels1

Eindhoven University of Technology1,Oxford Instruments2

Keywords

atomic layer deposition | nanoscale | plasma deposition

Symposium Organizers

David Horwat, Institut Jean Lamour-University de Lorraine
R. Mark Bradley, Colorado State University
Ulf Helmersson, Linköping Universitet
François Reniers, Université Libre de Bruxelles

Symposium Support

MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Raul Gago
Judith MacManus-Driscoll

In this Session