Low Temperature Plasmas as Processors of Matter

When and Where

Nov 28, 2017
8:15am - 8:45am

Sheraton, 3rd Floor, Fairfax B

Presenter(s)

Elijah Thimsen

Co-Author(s)

Elijah Thimsen¹

Washington University in St. Louis¹

Keywords

phase equilibria | plasma-enhanced CVD (PECVD) (chemical reaction) | self-assembly

Symposium Organizers

Chi-Chin Wu, U.S. Army Research Laboratory

Cheng-Che Hsu, National Taiwan University

Vasiliki Poenitzsch, Southwest Research Institute

Mohan Sankaran, Case Western Reserve University

Symposium Support

Journal of Applied Physics | AIP Publishing

MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Vasiliki Poenitzsch

Mohan Sankaran

2017 MRS Fall Meeting