November 25 - 30, 2017
Boston, Massachusetts
2017 MRS Fall Meeting
TC06.10.02

Microstructure and Mechanical Behavior of 3C-SiC Films Grown by Hot-Wall Chemical Vapor Deposition

When and Where

Nov 28, 2017
8:00pm - 10:00pm
Hynes, Level 1, Hall B

Presenter(s)

Co-Author(s)

Wei-Chien Tsai1,Hao-Wen Cheng1,Jia-Jen Chang1,Jin-Bao Wu1,Ming-Sheng Leu1

Industrial Technology Research Institute1

Keywords

chemical vapor deposition (CVD) (deposition) | hardness | microstructure

Symposium Organizers

Dan Mordehai, Technion
Julia Greer, California Institute of Technology
Marc Legros, CEMES-CNRS
Ruth Schwaiger, Karlsruhe Institute of Technology

Symposium Support

GDRi Mecano, CNRS
MRS Invitation to Publish All authors are invited to submit articles based on their 2017 MRS Fall Meeting presentations to journals in the MRS portfolio. (www.mrs.org/publications-news) Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as symposium collections. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more, including MRS Advances print options available at special rates during the meeting week only.

Session Chairs

Marc Legros

In this Session