Strained Si Nanowire Formation during Oxidation of Si/SiGe Fins

JC Nabity Lithography Systems, Lake Shore Cryotronics, Inc., MilliporeSigma (Sigma-Aldrich Materials Science), Nano| A Nature Research Solution, SpringerMaterials

All journals in the MRS portfolio welcome submissions based on the individual presentations at the 2016 MRS Fall Meeting. Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as collections of the symposia. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more about MRS Advances, including print options available at special rates during the meeting week only.