November 26 - December 1, 2016
Boston, Massachusetts
2016 MRS Fall Meeting
EM11.3.08

Atomic-Layer-Deposition Temperature Effect on Current Conduction in Al 2O 3 Films as Investigated Using Space-Charge-Controlled Field Emission Model

When and Where

Nov 29, 2016
11:00am - 11:15am
Hynes, Level 2, Room 201

Presenter(s)

Co-Author(s)

Atsushi Hiraiwa1,2,Daisuke Matsumura1,Hiroshi Kawarada1

Waseda University1,Nagoya University2

Keywords

dielectric properties | thin film

Symposium Organizers

Robert Kaplar, Sandia National Laboratories
Mitsuru Funato, Kyoto University
Martin Kuball, University of Bristol
Matteo Meneghini, University of Padova

Symposium Support

All journals in the MRS portfolio welcome submissions based on the individual presentations at the 2016 MRS Fall Meeting. Papers submitted and accepted for publication in MRS Advances (www.mrs.org/mrs-advances) will be available as collections of the symposia. Visit the MRS/Cambridge University Press Publications Booth #100 in the Exhibit Hall to learn more about MRS Advances, including print options available at special rates during the meeting week only.

Session Chairs

Ramon Collazo
Martin Kuball

In this Session