April 10 - 14, 2023
San Francisco, California
2023 MRS Spring Meeting
EL19.12.05
Area-Selective Atomic Layer Deposition using Aminosilane Precursors to Confer Oxide versus Nitride Selectivity
When and Where
Apr 14, 2023
11:30am - 11:45am
11:30am - 11:45am
Moscone West, Level 3, Room 3020
Presenter(s)
Co-Author(s)
Jinseon Lee1,Jeong-Min Lee1,Hongjun Oh2,Bonggeun Shong2,Tae Joo Park1,Woo-Hee Kim1
Hanyang University1,Hongik University2
Keywords
atomic layer deposition | selective area deposition | surface reaction
Symposium Organizers
Paul Berger, The Ohio State University
Supratik Guha, The University of Chicago
Francesca Iacopi, University of Technology Sydney
Pei-Wen Li, National Yang Ming Chiao Tung University
Symposium Support
Gold
IEEE Electron Devices Society
IEEE Electron Devices Society
Session Chairs
Francesca Iacopi
Pei-Wen Li