High Quality Al₂O₃/(111) (OH)-Terminated Diamond Interface for MOSFETs Fabrication

When and Where

Nov 28, 2023
11:00am - 11:15am

Hynes, Level 2, Room 210

Presenter(s)

Pietro Argenton

Martin KAH

Marine Couret

Nicolas Rouger

David Eon

Julien Pernot, University of Grenoble Alpes

Co-Author(s)

Pietro Argenton¹,Martin Kah¹,Marine Couret²,Nicolas Rouger²,David Eon¹,Julien Pernot¹

University Grenoble Alpes, CNRS, Grenoble INP, Institut Néel¹,Université de Toulouse, LAPLACE, CNRS, INPT²

Symposium Organizers

Philippe Bergonzo, Seki Diamond Systems

Chia-Liang Cheng, National Dong Hwa University

David Eon, Institut Neel

Anke Krueger, Stuttgart University

Symposium Support

Platinum
Great Lakes Crystal Technologies

Gold
Element Six

Silver
Plasmability, LLC
Qnami AG
SEKI DIAMOND SYSTEMS

Bronze
Applied Diamond, Inc.
DIAMFAB
Fraunhofer USA, Inc.

Session Chairs

Srabanti Chowdhury

Hiroshi Kawarada

Symposium Supporters

2023 MRS Fall Meeting

High Quality Al2O3/(111) (OH)-Terminated Diamond Interface for MOSFETs Fabrication