May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF03.02.06
UV Curing Effect on Mechanical Stability of Flexible Dielectric Thin Films Fabricated by Plasma-Enhanced Chemical Vapor Deposition of tetrakis(trimethylsilyloxy)silane Precursor
When and Where
May 9, 2022
3:00pm - 3:15pm
3:00pm - 3:15pm
Hawai'i Convention Center, Level 3, 328
Presenter(s)
Co-Author(s)
William Wirth1,Jacob Comeaux1,Rajib Chowdhury1,Seonhee Jang1
University of Louisiana at Lafayette1
Keywords
plasma-enhanced CVD (PECVD) (deposition) | thin film
Symposium Organizers
Aaron Franklin, Duke University
Joseph Andrews, University of Wisconsin
Thomas Anthopoulos, King Abdullah University of Science and Technology
Cinzia Casiraghi, University of Manchester
Session Chairs
Aaron Franklin
Dmitry Kireev