Three-Dimensional Nanofabrication with Sub-20 nm Resolution and Eight-Inch Wafer Scalability via Thermally Assisted Nanotransfer Printing

Nov 30, 2022
8:00pm - 10:00pm

Hynes, Level 1, Hall A

Tae Wan Park

Woon-Ik Park

Tae Wan Park¹,Young Lim Kang¹,Woon Ik Park¹

Pukyong National University¹

lithography (deposition) | nanostructure

Jeehwan Kim, Massachusetts Institute of Technology

Sanghoon Bae, Washington University in Saint Louis

Deep Jariwala, University of Pennsylvania

Kyusang Lee, University of Virginia

Kyusang Lee

Yu-Jung Lu