April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL08.02.06

Low Dielectric Constant SiCOH Films by Plasma Enhanced Chemical Vapor Deposition of tetrakis(trimethylsilyloxy)silane and cyclohexane Precursors

When and Where

Apr 23, 2021
6:30pm - 6:45pm
EL08

Presenter(s)

Co-Author(s)

William Wirth1,Jacob Comeaux1,Seonhee Jang1

University of Louisiana at Lafayette1

Keywords

thin film

Symposium Organizers

Silvia Armini, IMEC
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, University of Yamanashi
Andrew Simon, IBM T.J. Watson Research Center

Symposium Support

Bronze
MilliporeSigma

Session Chairs

Vincent Jousseaume
Andrew Simon

In this Session