November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.08.04
Development of Hybrid Organic-Inorganic Nanocomposites via the Atomic Layer Deposition of Nanoscale Metal Oxides Inside SU-8 Negative Photoresist
When and Where
Dec 6, 2021
2:15pm - 2:30pm
2:15pm - 2:30pm
SF01-Virtual
Presenter(s)
Co-Author(s)
Zhongyuan Li1,Nikhil Tiwale2,Ashwanth Subramanian2,Ying Li1,Chang-Yong Nam2,Seok-Woo Lee1
University of Connecticut1,Brookhaven National Laboratory2
Keywords
atomic layer deposition | composite
Symposium Organizers
Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester
Symposium Support
Bronze
Waterloo Institute for Nanotechnology
Waterloo Institute for Nanotechnology
Session Chairs
Maarit Karppinen
Graziella Malandrino