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  • Sessions listed November 29 – December 2 will be held in-person in Boston.
  • Sessions listed December 6 – 8 will be offered virtually.
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MRS is making frequent changes to the program, which is updated daily. Please check back for updates. Presenters: please refer to official email correspondence from MRS Meetings to confirm your presentation date and time.  Please contact meetings@mrs.org if there are discrepancies.

Symposium SF01—Advanced Atomic Layer Deposition and Chemical Vapor Deposition Techniques and Applications

2021-11-30   Show All Abstracts

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology
SF01.01: 2D Materials
Session Chairs
Gilbert Nessim
Wyatt Tenhaeff
Tuesday AM, November 30, 2021
Sheraton, 3rd Floor, Berkeley

10:30 AM - *SF01.01.01
The Versatility of CVD to Synthesize 1D and 2D Nanostructures—Carbon Nanotubes and Transition Metal Chalcogenides for Electronic and Electrochemical Applications

Gilbert Nessim1

Bar Ilan University1

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11:00 AM - SF01.01.02
Fluid Guided Chemical Vapor Deposition of Large-Scale Monolayer Two-Dimensional Materials

Bo Li1,Qianhong Wu1,Dong Zhou1,Ji Lang1

Villanova University1

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11:15 AM - SF01.01.03
Polymer Compatible Low Temperature Plasma-Enhanced Chemical Vapor Deposition of Graphene on Electroplated Cu for Flexible Hybrid Electronics

Chen-Hsuan Lu1,Chyi-Ming Leu2,Nai-Chang Yeh1

California Institute of Technology1,Industrial Technology Research Institute2

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11:30 AM - SF01.01.04
Evolution of the Graphene-Metal Interface During Chemical Vapor Deposition

Mitisha Surana1,Ganesh Ananthakrishnan1,Matt Poss1,Jad Yaacoub1,Tusher Ahmed1,Nikhil Chandra Admal1,Pascal Pochet2,Harley Johnson1,Sameh Tawfick1

University of Illinois at Urbana-Champaign1,Université Grenoble Alpes2

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SF01.02: Modeling and Novel Precursors, Mechanisms
Session Chairs
Bo Li
David Munoz-Rojas
Tuesday PM, November 30, 2021
Sheraton, 3rd Floor, Berkeley

1:30 PM - SF01.02.01
Applications of a Combined Approach of Kinetic Monte Carlo Simulations and Machine Learning to Model Atomic Layer Deposition (ALD) of Metal Oxides

Emily Justus1,David Magness1,Bikash Timalsina1,Judy Wu2,Ridwan Sakidja1

Missouri State University1,The University of Kansas2

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1:45 PM - SF01.02.02
Modeling Atomic Layer Deposition of Alumina as an Ultra-Thin Tunnel Barrier Using Reactive Molecular Dynamics

Devon Romine1,Yuxuan Lu1,Judy Wu2,Ridwan Sakidja1

Missouri State University1,University of Kansas2

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2:00 PM - SF01.02.03
Thermal Decomposition of Titanium(IV) Isopropoxide Studied by Reactive Force-Field Molecular Dynamic Simulations

Benazir Fazlioglu Yalcin1,Dundar Yilmaz1,Adri van Duin1,Roman Engel-Herbert1

The Pennsylvania State University1

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2:15 PM - SF01.02.04
Plasma-Enhanced Atomic Layer Deposition of Titanium Nitride—Impact of the N-Reactant on the Growth, Conformality and Quality of the Film

Badie Clemence1,Maissa Barr2,Julien Bachmann2,3,Thomas Defforge4,Gael Gautier4,Héloise Tissot1,Lionel Santinacci1

Aix-Marseille Université1,Friedrich-Alexander-Universität Erlangen-Nürnberg2,Saint-Petersburg State University3,Tours Université4

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SF01.03: Poster Session: Advanced Atomic Layer Deposition and Chemical Vapor Deposition Techniques and Applications
Session Chairs
Bo Li
Wyatt Tenhaeff
Tuesday PM, November 30, 2021
Hynes, Level 1, Hall B

8:00 PM - SF01.03.01
Growth of SiO2 by SMFD-ALD and Its Application in Thin-Film Capacitor

Mahesh Nepal1,Wendifer Ramos1,Tara Dhakal1

Binghamton University1

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8:00 PM - SF01.03.02
Correlation Between Plasma Etching Behavior of Silicon Carbide and Micropipe Defects

Je Hoon Oh1,Jongbeom Kim1,Je Jun Jeong1,Kyu Hwan Oh1

Seoul National University1

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2021-12-01   Show All Abstracts

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology
SF01.04: Organic and Hybrid Materials
Session Chairs
Emily McGuinness
Wyatt Tenhaeff
Wednesday AM, December 1, 2021
Sheraton, 3rd Floor, Berkeley

10:30 AM - *SF01.04.02
Topologically Controlled Surfaces via Chemical Vapor Deposition Polymerization

Joerg Lahann1

University of Michigan1

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11:00 AM - SF01.04.03
In Situ Synthesis of Ni3S2 Nanowires Filled Carbon Nanotubes and Study of Their Electrical Properties

Yuba Poudel1,Wenzhi Li1

Florida International University1

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11:15 AM - SF01.04.04
Halogenated Polymer Thin Film with Ultra-High Refractive Index

Ni Huo1

University of Rochester1

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SF01.05: Devices and Applications I
Session Chairs
Eran Edri
Andrew Meng
Wednesday PM, December 1, 2021
Sheraton, 3rd Floor, Berkeley

1:30 PM - SF01.05.01
Late News: Area Selective Plasma Enhanced Chemical Vapor Deposition of Silicon using a Fluorinated Precursor

Ghewa Akiki1

Ecole Polytechnique1

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1:45 PM - SF01.05.02
Using Molecular Layer Deposition to Instil Monovalent Selectivity in Cation Exchange Membranes Without Compromising Resistivity

Eran Edri1,Oded Nir1,Eyal Wormser1

Ben-Gurion University of the Negev1

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2:00 PM - SF01.05.03
Multiscale Materials Bear Multiscale Challenges—Why Bridging the Length Scales is Important for Developing New, Multifunctional, Bulk Nanocomposites.

Alexander Plunkett1,Berta Domènech1,Diletta Giuntini2,1,Gerold Schneider1

Hamburg University of Technology1,Eindhoven University of Technology2

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2:15 PM - SF01.05.04
Compliant and Transparent Polymer Barrier Layer for Flexible Optics

Yineng Zhao1,Ni Huo1,Wyatt Tenhaeff1

University of Rochester1

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2021-12-02   Show All Abstracts

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology
SF01.06: Advanced Processing Characterization
Session Chairs
Ni Huo
Mitisha Surana
Thursday AM, December 2, 2021
Sheraton, 3rd Floor, Berkeley

10:30 AM - *SF01.06.01
The Triumphs and Tragedies of Spatial Atomic Layer Deposition

David Munoz-Rojas1

LMGP Grenoble INP/CNRS1

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11:00 AM - SF01.06.02
Area-Selective Atomic Layer Deposition on Graphene Substrates

Gordon Koerner1,Quinton Wyatt1,Nikhila Paranamana1,Brady Bateman2,Matthias Young1,Matthew Maschmann1

University of Missouri1,Berea College2

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11:15 AM - SF01.06.03
In Situ Atmospheric Pressure Chemical Vapor Deposition of Carbon Nanofibers in the TEM

Andrew Meng1,Peifu Cheng2,Piran Ravichandran Kidambi2,Yuyang Song3,Nikhilendra Singh3,Eric Stach1

University of Pennsylvania1,Vanderbilt University2,Toyota Research Institute of North America3

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11:30 AM - SF01.06.04
Late News: Using In Situ Quartz Crystal Microbalance Gravimetry to Explore the Temperature Dependent Vapor Phase Infiltration of Trimethylaluminum into Poly(methyl methacrylate) and the Solvent Stability of the Resulting Hybrid Films

Emily McGuinness1,Mark Losego1

Georgia Institute of Technology1

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SF01.07: Advanced Characterization
Session Chairs
Ni Huo
Andrew Meng
Thursday PM, December 2, 2021
Sheraton, 3rd Floor, Berkeley

1:30 PM -
A Synchrotron-Assisted Investigation of the Thermal Decomposition of Zirconium Acetylacetonate—Pathways to the Formation of Metal-Containing Intermediates in the Gas Phase

Sebastian Grimm1,Seung-Jin Baik1,Patrick Hemberger2,Andreas Kempf1,3,Tina Kasper1,3,Burak Atakan1,3

University of Duisburg-Essen1,Paul Scherrer Institute2,Center for Nanointegration Duisburg-Essen (CENIDE)3

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1:45 PM -
In Situ Atmospheric Pressure Chemical Vapor Deposition of Carbon Nanofibers in the TEM

Andrew Meng1,Peifu Cheng2,Piran Ravichandran Kidambi2,Yuyang Song3,Nikhilendra Singh3,Eric Stach1

University of Pennsylvania1,Vanderbilt University2,Toyota Research Institute of North America3

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2:00 PM -
Late News: Using In Situ Quartz Crystal Microbalance Gravimetry to Explore the Temperature Dependent Vapor Phase Infiltration of Trimethylaluminum into Poly(methyl methacrylate) and the Solvent Stability of the Resulting Hybrid Films

Emily McGuinness1,Mark Losego1

Georgia Institute of Technology1

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2:15 PM -
Bandgap and Defect States Analysis Using Spectroscopy of Chemical Vapor Deposition (CVD) Grown Cu2O

Vivek Singh1,Jyoti Sinha1,Sushobhan Avasthi1

Indian Institute of Science Bangalore1

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2021-12-06   Show All Abstracts

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology
SF01.07: New Precursors and Reaction Mechanisms; Simulation and Modelling
Session Chairs
Anna Maria Coclite
Kevin Musselman
Monday AM, December 6, 2021
SF01-Virtual

10:30 AM - *SF01.07.01
Inorganic-Organic Materials and Interfaces through ALD/MLD for Emerging Energy Technologies

Maarit Karppinen1

Aalto University1

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11:00 AM - SF01.07.02
On the Synthesis of ALD Complex Oxides for Flexible Magnetic Devices

Mariona Coll1,Pengmei Yu1,Pol Sallés Perramon1,Sebastian Beer2,Anjana Devi2

ICMAB-CSIC1,Ruhr-Universität Bochum2

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11:15 AM - SF01.07.03
Impact of Precursor Chemistry on CVD Grown Comple Oxides and Noble Metals

David Graf1,Sanjay Mathur1,Michael Frank1

University of Cologne1

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11:30 AM - SF01.07.04
Plasma-Enhanced Chemical Vapor Deposition of P-Type Cu2O from Metal Organic Precursors

Daisy Gomersall1,2,Andrew Flewitt1

Electrical Engineering, University of Cambridge1,EPSRC CDT in Integrated Photonic and Electronic Systems2

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11:45 AM - SF01.07.06
Theoretical-Computational Study of the Nucleation Process of TiO2 on Carbon Nanostructures

Jonathan Rodríguez Hueso1,Hugo Borbon1,Jonathan Guerrero1

CNyN-UNAM-CICESE1

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12:00 PM - SF01.07.07
Late News: Large Single-Crystal Monolayer MoS2 Growth with Halide Activation and Its Mechanism

Cong Su1,2,3,Qingqing Ji4,3,Nannan Mao3,Xuezeng Tian5,Juan Carlos6,Jianwei (John) Miao7,William Tisdale3,Alex Zettl1,2,Ju Li3,Jing Kong3

University of California, Berkeley1,Lawrence Berkeley National Laboratory2,Massachusetts Institute of Technology3,ShanghaiTech University4,Institute of Physics, Chinese Academy of Sciences5,Oak Ridge National Laboratory6,UCLA7

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SF01.08: Organic, Hybrid, and 2D Materials
Session Chairs
Maarit Karppinen
Graziella Malandrino
Monday PM, December 6, 2021
SF01-Virtual

1:00 PM - *SF01.08.01
From Functional Polymers to Functional Devices Based on Nanofilms

Anna Maria Coclite1

Graz University of Technology1

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1:30 PM - SF01.08.02
ALD Growth of High-κ Dielectrics on Monolayer MoS2—The Role of the Substrate

Emanuela Schilirò1,Raffaella Lo Nigro1,Salvatore Ethan Panasci2,SimonPietro Agnello3,Franco Gelardi3,Fabrizio Roccaforte1,Filippo Giannazzo1

CNR-IMM of Catania1,University of Catania2,University of Palermo3

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1:45 PM - *SF01.08.03
Hybrid Chemical Vapor Deposition of Heterogeneous Thin Films

Yu Mao1

Oklahoma State University1

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2:15 PM - SF01.08.04
Development of Hybrid Organic-Inorganic Nanocomposites via the Atomic Layer Deposition of Nanoscale Metal Oxides Inside SU-8 Negative Photoresist

Zhongyuan Li1,Nikhil Tiwale2,Ashwanth Subramanian2,Ying Li1,Chang-Yong Nam2,Seok-Woo Lee1

University of Connecticut1,Brookhaven National Laboratory2

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2:30 PM - SF01.08.05
Progress in Growth of Carbon Nanotubes from Catalyst Particles Incorporating Diffusion Inhibitors

Michael Bronikowski1

University of Tampa1

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2:45 PM - SF01.08.06
Probing the Growth of Inorganic Clusters in Polymer Templates During Sequential Infiltration Synthesis

Xiang He1,Ruben Waldman1,David Mandia1,Nari Jeon1,Nestor Zaluzec1,Olaf Borkiewicz1,Uta Ruett1,Seth Darling1,Alex Martinson1,David Tiede1

Argonne National Laboratory1

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SF01.09: ALD/CVD General I
Session Chairs
Noa Lachman
Kenneth Lau
Monday PM, December 6, 2021
SF01-Virtual

6:30 PM - *SF01.09.01
A Chemical Vapor Desposition of High Refractive Index (n>1.9) Functional Polymer Films with Full Transparency in Whole Visible Region

Sung Gap Im1

KAIST1

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7:00 PM - SF01.09.02
Late News: Atomic Layer Deposition of c-Axis-Oriented GeTe/Sb2Te3 Superlattice for Low-Power and Large-Capacity Phase Change Memory

Chanyoung Yoo1,Woohyun Kim1,Jeong Woo Jeon1,Wonho Choi1,Byongwoo Park1,Gwangsik Jeon1,Yoon Kyeung Lee2,Cheol Seong Hwang1

Seoul National University1,Jeonbuk National University2

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7:15 PM - SF01.09.03
Complete Wafer Analysis of MoS2 Grown on SiO2/Si Substrate by Modulating Critical Parameters—Temperature, Mo:S Ratio and Flow Rate

Venkatarao Selamneni1,Sandeep Jajjara1,Parikshit Sahatiya1

BITS Pilani Hyderabad Campus1

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7:20 PM - SF01.09.04
Synthesis of Magnesium-Doped Hexagonal Boron Nitride Films By Chemical Vapor Deposition

Ranjan Singhal1,Elena Echeverria1,Dave McIlroy1,Raj Singh1

Oklahoma State University1

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7:35 PM - *SF01.09.05
Rapid and Accurate Prediction of the Volatility of Organometallic Precursor Complexes

Simon Elliott1,Asela Chandrasinghe1,Anand Chandrasekaran1,Yuling An1,Mathew Halls1

Schrödinger Inc1

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2021-12-07   Show All Abstracts

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology
SF01.10: Devices and Applications II
Session Chairs
Sung Gap Im
Kevin Musselman
Tuesday AM, December 7, 2021
SF01-Virtual

10:30 AM - *SF01.10.01
Importance of the Substrate on CVD Polymerization

Kenneth Lau1

Drexel University1

Show Abstract

11:00 AM - SF01.10.02
MOCVD Fabrication and Downconversion Luminescence of Eu-Doped BaF2 Thin Films for Photovoltaic Applications

Francesca Lo Presti1,2,Anna Pellegrino1,2,Adolfo Speghini3,4,Graziella Malandrino1,2

University of Catania1,INSTM Udr Catania2,Università di Verona3,INSTM Udr Verona4

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11:15 AM - SF01.10.03
Nanoscale Investigation of Al2O3 Thin Layers by Thermal- and Plasma-Enhanced Atomic Layer Deposition for Power Devices

Raffaella Lo Nigro1,Emanuela Schilirò1,Patrick Fiorenza1,Filippo Giannazzo1,Guido Condorelli2,Marzia Monforte2,Fabrizio Roccaforte1

CNR1,Università degli Studi di Catania2

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11:30 AM - SF01.10.04
Comparison of ALD grown AZO and ZnO Thin Film Heater Performances

Deniz Tugrul1,Doga Doganay1,Husnu Unalan1,Bilge Imer1

Middle East Technical University / Metallurgy and Materials Engineering1

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11:45 AM - SF01.10.05
Chemical Vapor Deposition of Cu2O Thin Films—Optimization of the Process and Applications as Photodetectors and HTL for Solar Cells

Anna Pellegrino1,Francesca Lo Presti1,Graziella Malandrino1

Università degli Studi di Catania1

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12:00 PM - SF01.10.06
Design of Functional Composite and All-Inorganic Nanostructures via Polymer Infiltration Using ALDTechnique

Elena Shevchenko1,2,Diana Berman3

Argonne National Laboratory1,The University of Chicago2,University of North Texas3

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12:15 PM - SF01.10.07
Multiferroic BiFeO3 Films Grown by MOCVD for Hybrid Energy Harvesters

Graziella Malandrino1,Quentin Micard1,Guglielmo Condorelli1

Univ di Catania1

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SF01.11: Devices and Applications III
Session Chairs
Noa Lachman
Kevin Musselman
Tuesday PM, December 7, 2021
SF01-Virtual

1:00 PM - *SF01.11.01
Rapid, Low-Temperature Growth of p-type Oxides by Atmospheric Pressure Chemical Vapor Deposition for Photovoltaics and Field-Effect Transistors

Robert Hoye4,Rob Jagt1,Tahmida Huq1,Mari Napari2,Maung Thway3,Tianyuan Liu3,David Meeth1,Kham Niang1,Andrew Flewitt1,Fen Lin3,Judith MacManus-Driscoll1

University of Cambridge1,University of Southampton2,National University of Singapore3,Imperial College London4

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1:30 PM - SF01.11.02
ALD-Grown IrOx-TiO2 Oxygen Evolution Reaction Electrocatalyst Alloys and Multilayers for Enhanced Stability and Performance

Paul McIntyre1,Aein Babadi1,Scott Monaghan2,Christopher O'Rourke3,Michael Braun1,Paul Hurley2,Andrew Mills3

Stanford University1,Tyndall National Institute, University College Cork2,Queens University Belfast3

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1:45 PM - SF01.11.03
Late News: Atomic Layer Deposition of Nickel Nanoparticles on Boron Nitride Nanotubes for Plasma-Assisted Catalysis

Ken Bosnick1,Elham Kamali Heidari1,Ania Sergeenko1

National Research Council Canada1

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2:00 PM - SF01.11.04
Atomic Layer Deposition of the Alkali Polyphosphazene Electrolytes to Enable Solid–State Batteries

Alexander Kozen1,R Nuwayahid1,Daniela Soltano1,Keith Gregorczyk1,Sang Bok Lee1,Gary Rubloff1

University of Maryland1

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2:15 PM - SF01.11.05
Ceramic Nanocomposites Through Pressureless Sintering of CVD-Produced Hybrid Ceramic Powders

Ken Bosnick1,Serguei Koutcheiko1,Jennifer Bruce1,Ruilin Liang1,Syed Bukhari1

National Research Council Canada1

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2:30 PM - *SF01.11.06
Tuning Conformality in Templated Initiated Chemical Vapor Deposition for Fabrication of Functional Nanostructures

Gozde Ince1,2

Sabanci University1,Sabanci University Nanotechnology Research and Application Center2

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2021-12-08   Show All Abstracts

Symposium Organizers

Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester

Symposium Support

Bronze
Waterloo Institute for Nanotechnology
SF01.12: Advanced ALD/CVD Processing
Session Chairs
Robert Hoye
Graziella Malandrino
Wednesday AM, December 8, 2021
SF01-Virtual

10:30 AM - *SF01.12.01
Understanding and Tuning Surface Chemistry to Achieve Area Selective ALD

Stacey Bent1

Stanford University1

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11:00 AM - *SF01.12.02
Atomic Layer Deposition of Cobalt Phosphate as Electrocatalyst for the O2 Evolution Reaction—Process Characterization and Mechanism of Electrochemical Activation

Mariadriana Creatore1

Eindhoven University of Technology1

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11:30 AM - SF01.12.04
Atomic Layer Deposition of Epitaxial Perovskite Nickelates

Tae Joon Park1,Zhen Zhang1,Shriram Ramanathan1

Purdue University1

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11:45 AM - SF01.12.05
Tuning the Electrochemical Properties of Multifunctional Catalyst Layers by Plasma-Enhanced Atomic Layer Deposition

Matthias Kuhl1,Alex Henning1,Lukas Haller1,Laura Wagner1,Chang-Ming Jiang1,Verena Streibel1,Ian Sharp1,Johanna Eichhorn1

TU Munich1

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12:00 PM - SF01.12.06
Development of Strained-Germanium Based Light-Emitting Microstructures via Liquid Phase Epitaxy

Buse Unlu1,Milad Ghasemi1,Selcuk Yerci1,Cicek Boztug2

Middle East Technical University1,TED University2

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SF01.13: ALD/CVD General II
Session Chairs
Kevin Musselman
Wednesday PM, December 8, 2021
SF01-Virtual

1:00 PM - SF01.13.02
Controlling Reaction Paths for Growth of Inorganic Nanowires Floating in the Gas Phase

Richard Schaeufele1,2,Juan Vilatela1,Miguel Vazquéz-Pufleau1

Imdea Materials Institute1,Universidad Autónoma de Madrid2

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1:15 PM - SF01.13.03
Atmospheric-Pressure Spatial Atomic Layer Deposition (AP-SALD) Of Metal Oxides for Gravimetric Gas Sensing Applications

Masoud Akbari1,Viet Huong Nguyen2,Gaëtan Debontride3,Martial Defoort1,Skandar Basrour1,Kevin Musselman4,David Munoz-Rojas1

University of Grenoble Alpes1,Phenikaa University2,CIME Nanotech/Grenoble INP3,University of Waterloo4

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1:30 PM - SF01.13.04
P-Type Cu2O Thin Films Deposited via Atmospheric-Pressure Spatial Atomic Layer Deposition—A Step Towards Low-Cost Photovoltaic Solar Harvesters

Abderrahime Sekkat1,2,3,Viet Huong Nguyen4,Daniel Bellet1,Anne Kaminski-Cachopo2,Guy Chichignoud3,David Munoz-Rojas1

LMGP1,IMEP-LaHC2,SIMaP3,Faculty of Materials Science and Engineering, Phenikaa University4

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1:45 PM - SF01.13.05
Bandgap and Defect States Analysis Using Spectroscopy of Chemical Vapor Deposition (CVD) Grown Cu2O

Vivek Singh1,Jyoti Sinha1,Sushobhan Avasthi1

Indian Institute of Science Bangalore1

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2:00 PM - SF01.13.06
A Synchrotron-Assisted Investigation of the Thermal Decomposition of Zirconium Acetylacetonate—Pathways to the Formation of Metal-Containing Intermediates in the Gas Phase

Sebastian Grimm1,Seung-Jin Baik1,Patrick Hemberger2,Andreas Kempf1,3,Tina Kasper1,3,Burak Atakan1,3

University of Duisburg-Essen1,Paul Scherrer Institute2,Center for Nanointegration Duisburg-Essen (CENIDE)3

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