10:30 AM - *EN07.10.01
Nanoslot Patterns to Tune the Phonon Transport within Thin Films
Qing Hao1
University of Arizona1
Show Abstract
Nanoporous thin films with periodic circular pores have been extensively studied for their potential applications such as thermoelectrics, heat waveguides, thermal cloaks, thermal diodes, and heat imaging [1]. Fundamentally, it is acknowledged that diffusive phonon scattering by pore edges, as classical phonon size effects, is the major mechanism for the observed thermal conductivity reduction. Despite some earlier debates, phononic effects due to coherent phonon transport within a periodic structure are found to be only critical at cryogenic temperatures [2-4].
Based on classical phonon size effects, new nanoporous patterns have been pursued to better tune the thermal conductivity of thin films [5, 6]. As one new pattern, periodic nanoslots can be employed to effectively tune the in-film phonon transport. When phonons travel ballistically through the narrow neck between adjacent nanoslots, a ballistic thermal resistance is introduced to lower the thermal conductivity. As a result, the lattice thermal conductivity can be largely reduced along the direction perpendicular to nanoslot rows, while keeping a much higher thermal conductivity along the direction parallel to nanoslots. The in-plane thermal anisotropy can be further enhanced with offset nanoslot patterns [7], which can largely benefit the thermal management of thin-film devices.
In analytical modeling, an accurate characteristic length can be derived for nanoslot patterns to predict the thermoelectric properties of such films [8, 9], whereas an accurate characteristic length is hard to be found for thin films with periodic circular pores [1]. For representative nanoslot patterns, the thermoelectric properties can be predicted and compared with nanostructured bulk Si [7, 8]. The predicted thermal conductivities agree well with the experimental data on some nanoslot-patterned Si thin films. A bulk-like specific heat is also measured for these thin films, indicating negligible phononic effects to change the phonon dispersion.
In nanoslot-patterned thin films, the in-plane thermal resistance is a strong function of the neck width between nanoslots. By measuring a series of samples with varied neck widths, inverse phonon transport analysis can be used to reconstruct the in-plane phonon MFP distribution down to ~10 nm [9, 10]. In this aspect, pump probe measurements using nanofabricated heating patterns [11-12] are not suitable for suspended thin films because phonon modes and scattering can be remarkably affected with deposited metal patterns [13]. In practice, nanoporous patterns can also be used to achieve two-dimension thermal cloaking or thermal camouflaging [7]. This new application will also be discussed.
References:
1. Xiao et al., ES Materials & Manufacturing, 2019, 5, 2-18.
2. Hao et al., Scientific reports, 2018, 8, 1-9.
3. Maire et al., Science Advances, 2017, 3, e1700027.
4. Lee et al., Nature Communications, 2017, 8, 14054.
5. Romano et al., Applied Physics Letters, 2014, 105, 033116.
6. Romano et al., Applied Physics Letters, 2017, 110, 093104.
7. Xiao et al., International Journal of Heat and Mass Transfer, 2021, 170, 120944.
8. Hao et al., Physical Review Applied, 2020, 13, 064020.
9. Hao et al., Materials Today Physics, 2019, 10, 100126.
10. Anufriev et al., Physical Review B, 2020, 101, 115301.
11. Hu et al., Nature nanotechnology, 2015, 10, 701-706.
12. Zeng et al., Scientific reports, 2015, 5, 17131.
13. Anufriev et al., Nanoscale, 2017, 9, 15083-15088.